ISBN/价格: | 0-8194-4107-4:861.04元 |
---|---|
作品语种: | chi |
出版国别: | CN |
题名责任者项: | In-line characterization, yield,reliability, and failure analysis in microelectronic manufacturing II V.4406/.By SPIE |
出版发行项: | Bellingham:,SPIE:,2001.6 |
载体形态项: | 242页:;+16开 |
丛编项: | Proceedings of SPIE V.4406 |
记录来源: | CN 20011209 |