书目详细信息
： In-line characterization techniques for performance and yield enhancement in microelectronic manufac
书目信息 机读格式(MARC)
| ISBN/价格： | 0-8194-2647-4:￥60.00 |
|---|---|
| 题名责任者项： | In-line characterization techniques for performance and yield enhancement in microelectronic manufac V.3215/.SPIE |
| 出版发行项： | Austin:,SPIE:,1997.10 |
| 载体形态项： | 186页 |
| 一般附注： | SPIE conference on microlithography and metrology in micromachining |
| 个人名称等同： | SPIE |