ISBN/价格: | 0-8194-7060-7:RMB185 |
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作品语种: | eng |
题名责任者项: | MEMS/MOEMS components and their applications V.special focus topics:transducers at the micro-nano interface Vol.6885/.by SPIE |
出版发行项: | Bellingham:,SPIE:,2008.1 |
载体形态项: | multi-stage:;+ill.:;+29cm |
记录来源: | CN 20080704 |