| ISBN/价格: | 0-8194-7060-7:RMB185 |
|---|---|
| 作品语种: | eng |
| 题名责任者项: | MEMS/MOEMS components and their applications V.special focus topics:transducers at the micro-nano interface Vol.6885/.by SPIE |
| 出版发行项: | Bellingham:,SPIE:,2008.1 |
| 载体形态项: | multi-stage:;+ill.:;+29cm |
| 记录来源: | CN 20080704 |