书目详细信息
： Flatness, roughness,and discrete defect characterization for computer disks,wafers,and flat panel
书目信息 机读格式(MARC)
| ISBN/价格： | 0-8194-2250-9:￥60.00 |
|---|---|
| 题名责任者项： | Flatness, roughness,and discrete defect characterization for computer disks,wafers,and flat panel V.2862/.SPIE |
| 出版发行项： | Denver:,SPIE:,1996.8 |
| 载体形态项： | 188页 |
| 一般附注： | SPIE‘s international symposium on optical science, engineering and instrumentation |
| 个人名称等同： | SPIE |